PECVD生长无氢掺杂锗硅波导中的超强紫外写入光栅

David J. Moss, John Canning, M. Faith, P. Leech, P. Kemeny, Christian Vestergaard Poulsen, Otto Leistiko
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引用次数: 1

摘要

在本文中,我们报告了我们认为是迄今为止最强的波导光栅,由PECVD生长的germano矽酸盐肋波导紫外曝光,而不使用氢负载。这种强度的光栅对于制造WDM器件应该绰绰有余。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-strong UV written gratings in PECVD grown Ge doped silica waveguides with no hydrogen loading
In this paper we report what we believe to be the strongest waveguide gratings to date written by UV exposure of germanosilicate rib waveguides grown by PECVD, and without the use of hydrogen loading. Gratings of this strength should be more than adequate for fabricating WDM devices.
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