{"title":"微光学高度自动化加工中的表面图形测量","authors":"H. Heimbeck","doi":"10.1364/oft.1994.owb5","DOIUrl":null,"url":null,"abstract":"Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.","PeriodicalId":142307,"journal":{"name":"Optical Fabrication and Testing Workshop","volume":"97 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Surface Figure Metrology during highly Automated Fabrication of Microoptics\",\"authors\":\"H. Heimbeck\",\"doi\":\"10.1364/oft.1994.owb5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.\",\"PeriodicalId\":142307,\"journal\":{\"name\":\"Optical Fabrication and Testing Workshop\",\"volume\":\"97 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fabrication and Testing Workshop\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1994.owb5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1994.owb5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface Figure Metrology during highly Automated Fabrication of Microoptics
Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.
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