{"title":"利用Mems电子显微镜成像","authors":"M. Krysztof, M. Białas, T. Grzebyk","doi":"10.1109/IVNC57695.2023.10188948","DOIUrl":null,"url":null,"abstract":"The article presents imaging results performed using a MEMS electron microscope setup. Three different electron detectors were developed and tested. The detectors integrated with a scanning octupole system were placed inside the JEOL JSM IT-100 SEM sample chamber. Using the SEM electron beam, the test images were obtained, confirming the usefulness of all three detectors. Moreover, a comparison between images obtained using the JEOL microscope and MEMS EM setup is presented.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Imaging Using Mems Electron Microscope\",\"authors\":\"M. Krysztof, M. Białas, T. Grzebyk\",\"doi\":\"10.1109/IVNC57695.2023.10188948\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The article presents imaging results performed using a MEMS electron microscope setup. Three different electron detectors were developed and tested. The detectors integrated with a scanning octupole system were placed inside the JEOL JSM IT-100 SEM sample chamber. Using the SEM electron beam, the test images were obtained, confirming the usefulness of all three detectors. Moreover, a comparison between images obtained using the JEOL microscope and MEMS EM setup is presented.\",\"PeriodicalId\":346266,\"journal\":{\"name\":\"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVNC57695.2023.10188948\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC57695.2023.10188948","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The article presents imaging results performed using a MEMS electron microscope setup. Three different electron detectors were developed and tested. The detectors integrated with a scanning octupole system were placed inside the JEOL JSM IT-100 SEM sample chamber. Using the SEM electron beam, the test images were obtained, confirming the usefulness of all three detectors. Moreover, a comparison between images obtained using the JEOL microscope and MEMS EM setup is presented.
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