原子力显微镜自动化:一种自适应控制方法

Osamah M. El-Rifai, K. Youcef-Toumi
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引用次数: 38

摘要

原子力显微镜(AFM)需要用户手动调整控制器增益和扫描参数,以试验和错误的方式为不同的样品悬臂组合。本文提出了实现这一过程自动化的步骤。建模和实验结果揭示了AFM的动力学结构以及扫描和控制器参数的不同选择对其的影响。设计了鲁棒自适应控制器来解决这些问题。仿真扫描实验验证了所设计自适应控制器的性能。自适应控制器消除了用户手动调整不同样本悬臂组合的控制器增益的需要,并补偿了用户选择不同扫描参数所产生的不确定性。此外,与调谐良好的积分控制器相比,自适应控制器可以大大减少接触力和回迹线设定点误差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On automating atomic force microscopes: an adaptive control approach
The atomic force microscope (AFM) requires the user to manually tune controller gains and scan parameters in a trial and error fashion for different sample cantilever combinations. In this paper, steps towards automating this process are presented. Modeling and experimental results are shown revealing the structure of AFM dynamics and how it is impacted by different choices of scan and controller parameters. A robust adaptive controller is designed to address these issues. The performance of the designed adaptive controller is verified by simulating scanning experiments. The adaptive controller eliminates the need for the user to manually tune controller gains for different sample cantilever combinations and compensates for uncertainties arising from the user choice of different scan parameters. In addition, a substantial reduction in contact force and retrace line setpoint error can be achieved with the adaptive controller in comparison with a well-tuned integral controller.
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