用多波长干涉法测量小型光学器件

Optical Angular Momentum Pub Date : 2019-12-30 DOI:10.1117/12.2542914

M. Wendel

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引用次数: 1

摘要

介绍了一种基于长、短相干干涉点探头系统在同一测量装置中的组合测量小透镜和薄透镜的新方法。介绍了基本工作原理和初步结果，并强调了这种方法的好处。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Measurement of small optics by use of a multi-wavelength interferometrical approach

A new approach for measurement of small and thin lenses is introduced, based on the combination of long and short coherence interferometrical point probe systems in one measurement device. The basic working principle, as well as first results, are presented, and the benefits of this approach are highlighted.

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Optical Angular Momentum

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