微波集成电路的器件内部间接电光探测非接触特性

Digest of Papers Eleventh Annual 1993 IEEE VLSI Test Symposium Pub Date : 1993-04-06 DOI:10.1109/VTEST.1993.313296

F. Taenzler, T. Novak, E. Kubalek

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引用次数: 9

摘要

介绍了一种基于iii - v半导体和si衬底材料的单片微波集成电路(MMIC)内部测试的非接触式工作测试系统。该电光测试系统确定MMIC内测试点上方的电场。测试结果表明，该测试系统具有良好的设备内部功能控制和故障分析能力

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Contactless characterization of microwave integrated circuits by device internal indirect electro-optic probing

Deals with a contactless working test system for the internal test of monolithic microwave integrated circuits (MMIC) based on both: III-V-semiconductor and Si-substrate material. This electro-optic test system determines the electrical field above the test-point within the MMIC. Measurements demonstrate the capability of this test system for device internal function control and failure analysis.<>

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Digest of Papers Eleventh Annual 1993 IEEE VLSI Test Symposium

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