使用频率相关模式耦合参数的表面声波器件的精确模拟

Hao Wang, Weibiao Wang, Haodong Wu, Bo Su, Y. Shui
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引用次数: 0

摘要

在此基础上,我们提取了所有频率相关的模式耦合(COM)参数,这些参数将用于表面声波(SAW)器件的快速仿真和优化设计。采用有限元/边界元法计算了有限长度周期光栅内正反向表面声波在各频率下的精确场分布。选取满足COM模型假设的周期结构的中间分量作为研究对象。根据这些场分布,计算出单个单元的p -矩阵元素的值。得到了以频率为函数的COM参数。具体而言,分别得到了反射系数与传播速度的频率依赖关系。利用所得的COM参数,对128°YX-LiNbO3衬底上的单端口谐振腔进行了仿真,通过有限元/边界元法得到的导纳曲线与仿真结果吻合较好。这些结果验证了该方法的有效性和准确性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Precise simulation of surface acoustic wave devices using frequency-dependent coupling-of-modes parameters
Herein we extract all the frequency-dependent coupling-of-modes (COM) parameters, which will be used to the rapid simulation and optimal design of surface acoustic wave (SAW) devices. FEM/BEM is used to calculate the exact field distributions of forward and backward surface acoustic waves within a finite-length periodic grating at every frequency. The middle component of the grating, regarded as a periodic structure, is selected to be investigated which can satisfy the presupposition of the COM model. From these field distributions, the values of P-matrix elements of one cell are calculated. The COM parameters taken as functions of frequency are accurately obtained. Specifically, the frequency-dependent relationships of reflection coefficient and propagation velocity are obtained independently. Using the resultant COM parameters, a one-port resonator on the substrate of 128°YX-LiNbO3 is simulated and the admittance curve shows good agreement with the simulating results using FEM/BEM. These results verify the validity and accuracy of this method.
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