激光诱导薄膜直接沉积:薄膜转移

Binglin Zhang
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引用次数: 0

摘要

激光诱导直接沉积的过程是将光学透明基片背面的原始薄膜通过聚焦脉冲激光辐射直接转移到位于薄膜后面的目标基片上[1]。利用这种技术,只有原始薄膜的一小部分区域被聚焦的激光辐射照射,可以转移到目标基片上。显然,新技术的优点是可以制造出薄膜的微点。由于激光束可以聚焦在微米光斑上,因此该技术在原理上可以制造出微米光斑。这可能是一种潜在的强大技术,用于制造微电子和光电子器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser-induced direct deposition of thin films: film transfer
The process of the laser-induced direct deposition is that the original film on the back side of an optically transparent substrate is directly transferred to a target substrate locatted behind the film by focused pulsed laser radiation[ 1] . Only a small region of the original film, which is exposed by focused laser rediatiom, can be transferred to the target substrate using this technique. Obviously, the advantage of the new technique is to fabricate micro spots of thin films. In principle, micrometer spot of thin film can be fabricated by this technique, because laser beam can be focused in micrometer spot. Probably it is a potentially powerful technique for the fabrication of micro and opto-electronics devices.
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