用微环谐振器同时测量氮化硅波导的宽度和厚度

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9673898

Mohammad Reza Jalali Azizpour, D. Phan, Abubaker M. Tareki, B. Le Drogoff, M. Chaker, M. Ménard

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引用次数: 0

摘要

我们演示了从微环谐振器的光谱中提取制备的氮化硅波导的尺寸。我们首次证明了该方法同时适用于TE和TM极化。

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Simultaneous Measurements of the Fabricated Width and Thickness of Silicon Nitride Waveguides with Microring Resonators

We demonstrate the extraction of the dimensions of fabricated silicon nitride waveguides from the spectrum of a microring resonator. We show for the first time that this method is applicable with both the TE and TM polarizations.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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