微加工折叠波导行波管振荡器的实验研究

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) Pub Date : 2004-07-11 DOI:10.1109/IVNC.2004.1354928

S.T. Han, J. So, K. Jang, Y. Shin, S. Jeon, J.H. Kim, S.S. Chang, N. Ryskin, G. Park

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引用次数: 0

摘要

LIGA(深x射线光刻:光刻、电振成形、光振成形)制造的真空管(折叠波导行波管振荡器)(德语首字母缩写)工艺首次研制成功。

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Experimental investigations for micro-fabricated folded-waveguide traveling-wave tube oscillators

Vacuum tube (folded-waveguide traveling-wave tube oscillator) fabricated by LIGA (deep X-ray lithography: Lithographic, Galvanoformung, Abformung; German acronym) process was successfully developed for the first time.

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来源期刊

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)

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