制造全聚合物薄膜晶体管的低温工艺

R. Meixner, F. A. Yildirim, R. R. Schliewe, H. Goebel, W. Bauhofer, W. Krautschneider
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引用次数: 0

摘要

我们报告了一种制造全聚合物薄膜晶体管的低温工艺,避免了固化和退火温度高于80°C。能源效率的这一方面直接支持了有机器件在制造中的低成本特性。该工艺正在通过使用商业上可用的聚合物进行演示,例如聚(乙烯二氧噻吩)/聚苯磺酸分散体代表源、漏极和栅极,Norland光学粘合剂noa75作为栅极电介质和区域规则聚(3-己基噻吩-2,5-二基)作为半导体聚合物-所有这些都在聚氯乙烯衬底上。已经实现了通道长度为25 μm,通道宽度为1mm ~ 5mm的功能器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low-Temperature Process for Manufacturing All Polymer Thin-Film Transistors
We report a low-temperature process to manufacture an all polymer thin-film transistor avoiding curing and annealing temperatures higher than 80°C. This aspect of energy efficiency directly supports the low-cost feature of organic devices in fabrication. The process is being demonstrated by using commercially available polymers such as poly(ethylenedioxythiophene)/polystyrenesulfonate dispersion representing the source, drain and gate electrode, Norland optical adhesive NOA 75 as the gate-dielectric and regioregular poly(3-hexylthiophene-2,5-diyl) as the semiconducting polymer - all on a polyvinyl chloride substrate. Functional devices with a channel length of 25 μm and a channel width of 1 mm to 5 mm have been realized.
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