用正交速度抛光工具对非球面进行抛光

International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) Pub Date : 2021-12-13 DOI:10.1117/12.2604036

Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang

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引用次数: 0

摘要

研制了一种高效正交速度抛光工具(OVPT)。OVPT安装在工业机器人的端缘上。工业机器人的运动范围达到φ 1000毫米。机器人OVPT是一种高效的非球面精密光学加工方法。利用OVPT机器人对直径为360 mm的熔融石英抛物面镜进行抛光。基于工业机器人的OVPT收敛性突出。经过4次抛光，最终表面误差RMS为16.6nm，初始表面误差RMS为69.5nm。OVPT机器人抛光表面粗糙度Ra为1.5nm。

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Aspheric surface polishing with orthogonal velocity polishing tool

An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.

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International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)

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