{"title":"微膜电势均匀性的多准则评价","authors":"H. Teodorescu, V. Cojocaru, A. Katashev","doi":"10.23919/AE.2019.8867010","DOIUrl":null,"url":null,"abstract":"We propose a method of characterization and assessment of the uniformity of the surface properties of samples based on a set of derived parameters. Local (sliding window) variance, Allan and Hadamard variances and centers of potential for measurement lines are used to assess the uniformity. The method is exemplified for the potential of piezoelectric thin (nano) films, but it is applicable to a large range of properties.","PeriodicalId":177095,"journal":{"name":"2019 International Conference on Applied Electronics (AE)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Multi-Criterial Assessment of the Uniformity of the Electrical Potential of Micro-Films\",\"authors\":\"H. Teodorescu, V. Cojocaru, A. Katashev\",\"doi\":\"10.23919/AE.2019.8867010\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose a method of characterization and assessment of the uniformity of the surface properties of samples based on a set of derived parameters. Local (sliding window) variance, Allan and Hadamard variances and centers of potential for measurement lines are used to assess the uniformity. The method is exemplified for the potential of piezoelectric thin (nano) films, but it is applicable to a large range of properties.\",\"PeriodicalId\":177095,\"journal\":{\"name\":\"2019 International Conference on Applied Electronics (AE)\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Applied Electronics (AE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/AE.2019.8867010\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Applied Electronics (AE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/AE.2019.8867010","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Multi-Criterial Assessment of the Uniformity of the Electrical Potential of Micro-Films
We propose a method of characterization and assessment of the uniformity of the surface properties of samples based on a set of derived parameters. Local (sliding window) variance, Allan and Hadamard variances and centers of potential for measurement lines are used to assess the uniformity. The method is exemplified for the potential of piezoelectric thin (nano) films, but it is applicable to a large range of properties.
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