V. Tarasenko, S. Avdeev, V. Panarin, V. Skakun, E. Sosnin
{"title":"大电流电子学研究所一种新的准分子灯模型","authors":"V. Tarasenko, S. Avdeev, V. Panarin, V. Skakun, E. Sosnin","doi":"10.1117/12.2541530","DOIUrl":null,"url":null,"abstract":"A new models of Xe2-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm2 has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe2-excilamps.","PeriodicalId":205170,"journal":{"name":"Atomic and Molecular Pulsed Lasers","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A new excimer lamp model of Institute of High Current Electronics\",\"authors\":\"V. Tarasenko, S. Avdeev, V. Panarin, V. Skakun, E. Sosnin\",\"doi\":\"10.1117/12.2541530\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new models of Xe2-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm2 has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe2-excilamps.\",\"PeriodicalId\":205170,\"journal\":{\"name\":\"Atomic and Molecular Pulsed Lasers\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-12-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Atomic and Molecular Pulsed Lasers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2541530\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Atomic and Molecular Pulsed Lasers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2541530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A new excimer lamp model of Institute of High Current Electronics
A new models of Xe2-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm2 has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe2-excilamps.
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