准分子气体放电负荷匹配条件的估计

Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344) Pub Date : 2002-12-10 DOI:10.1109/IAS.2002.1044098

K. Oleg, M. Serguei, N. Mutsuo, M. Hideaki

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引用次数: 0

摘要

准分子气体放电是一种有效的产生紫外光的方法，但这种负载的电源能量性能较低，阻碍了其在实际中的广泛应用。为了设计更高效的电源，本研究对准分子气体放电负载的频率特性和功率匹配条件进行了评估。本文提出了一种新的评价方法，并介绍了该方法的应用结果，同时对供电进行了考虑。

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Estimation of load matching conditions for the excimer gas discharge load

Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.

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Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)

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