NEOSTED宽频带减反射涂层

Jiří Budasz, J. Junek, J. Václavík
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引用次数: 1

摘要

本文研究了欧洲航天局NEOSTED项目中用于特殊光学元件的宽带减反射涂层的研制。这项工作的目的是找到一种合适的光学涂层设计,并开发其生产工艺,使其满足在470 - 770 nm波长范围内涂层的平均反射率必须低于0.5%的主要要求。选择了离子束辅助沉积(IBAD)法制备二氧化钛(TiO2)和二氧化硅(SiO2)的组合进行了实际实验,并最终用于生产。最终决定所提出的设计方案和所涉及的材料,特别是设计中所使用的层数,并结合厚度控制技术。生产前测试表明,基于后工序测量的厚度设定值校正石英监测仪适合于应用中沉积厚度的控制。本文介绍了生产前测试的数据和生产第一部分的数据。沉积层厚度的均匀性是通过测量样品的厚度来评估的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Broadband antireflective coating for NEOSTED
This paper deals with the development of a broadband antireflective coating for a special optical components for the NEOSTED project by European Space Agency (ESA). The aim of this work was to find a suitable design of the optical coating and to develop its production process so it meets the main requirement in which the average reflectance of the coating must be under 0.5 % for wavelengths in the range of 470 - 770 nm. The combination of titanium dioxide (TiO2) and silicon dioxide (SiO2) prepared by the ion beam assisted deposition (IBAD) was chosen for practical experiments and finally for the production as well. The final decision among the proposed designs and materials involved especially the number of layers used in the design in combination with the thickness control technology. From preproduction tests it turned out that the quartz monitor with the thickness set point correction based on a post process measurement is suitable for controlling deposited thickness in the application. This paper presents data from the preproduction tests and data from the first part of the production. A homogeneity of the deposited layer thickness was evaluated based on the measurement of the thickness across the sample.
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