缓速技术在电子束记录仪中的应用

2006 Optical Data Storage Topical Meeting Pub Date : 2006-06-05 DOI:10.1109/ODS.2006.1632738

M. Kobayashi, H. Kitahara, Y. Kojima, Y. Wada, M. Katsumura, T. Iida

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引用次数: 4

摘要

本文介绍了电子束记录器(EBR)的发展概况，为今后光盘存储介质的发展提供了参考。开发了一个旋转平台，并安装在EBR上。使用延迟场的EBR仅通过调节衬底的高压(10 keV到50 keV)来改变束流能量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Application of Retarding Technology to Electron Beam Recorder

The paper reports the outline of the developed electron beam recorder (EBR) for the purpose of developing future optical disk storage media. A rotation stage is developed and is installed to the EBR. The EBR using the retarding field can vary the beam energy only by adjusting the high voltage for the substrate (10 keV to 50 keV)

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2006 Optical Data Storage Topical Meeting

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