Growth of a-axis Textured Pulsed Laser Deposited VO2 Nanostructures on Glass Substrate

Vanadium dioxide thin film nanostructures were synthesized by pulsed laser deposition on soda lime glass at a substrate temperature of 600°C and an oxygen ambient pressure of 15 mTorr. The effect of cooling pressure on the crystalline orientation of VO2 nanostructures was investigated. As the cooling oxygen pressure is increased, the VO2 nanostructures exhibit sharp a-axis diffraction peaks, showing the growth of (1 0 0) oriented VO2 on glass, which is characteristic of the VO2 monoclinic phase and implies that pure highly a-axis textured VO2 was formed. We found that the growth mechanism and substrate–film interaction play important roles in the development of these well-textured films via the formation of an interlayer of SiO2.