一类新型电容式微机械超声换能器

O. Ahrens, Dennis Hohlfeld, A. Buhrdorf, O. Glitza, Josef Binder
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引用次数: 12

摘要

本文将介绍最近成功实现的一种新型电容式微机械超声换能器(cMUT)。这种新的换能器设计利用结构化的氧化硅牺牲层以及高度掺杂的多晶硅导电膜。到目前为止,cMUT已经生产出谐振频率在1到4 MHz的范围内。这些装置已应用于空气中的位移测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A new class of capacitive micromachined ultrasonic transducers
A new set-up of capacitive micromachined ultrasonic transducers (cMUT) will be described that recently have been successfully realized. This new transducer design utilizes a structured silicon oxide sacrificial layer as well as a highly doped and, therefore, conductive membrane of polycrystalline silicon. So far, cMUT have been produced with resonance frequencies in the range from 1 to 4 MHz. These devices have been applied to a displacement measurement in air.
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