6ghz范围SAW标签和传感器

V. Plessky, S. Suchkov, Z. Davis, M. Lamothe
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引用次数: 0

摘要

演示了使用6ghz频率用于无源saw标签和传感器类型设备的可行性。给出了一种直列6ghz声呐标签的设计实例。假设使用超宽频带(UWB, B=775MHz),可以显著减小标签尺寸,反射响应损失保持在约50dB的可接受水平。saw标签和传感器测试装置已使用电子束光刻和纳米压印技术制造,其性能接近预测,包括约55dB的损耗水平。讨论了纳米压印与电子束光刻技术相结合实现高通量制造的可能性。演示了使用NIL生产的SAW传感器测试设备。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
6 GHz range SAW tags and sensors
The feasibility of using 6 GHz frequencies for passive SAW-tags and sensors type devices is demonstrated. An example of the in-line 6 GHz SAW tag design is presented. Supposing that Ultra-Wide-frequency Band (UWB, B=775MHz) can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of approximately 50dB. The SAW-tags and sensor test device has been manufactured using E-beam lithography and Nano-Imprint technology and demonstrate performance close to predicted, including the loss level of approximately 55dB. The possibility of high throughput manufacturing by combining Nano-Imprint and E-beam Lithography (NIL) is discussed. SAW sensor test devices produced using NIL are demonstrated.
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