高温条件下介电材料的二次电子发射

Suharyanto, S. Michizono, Y. Yamano, Y. Saito, S. Kobayashi
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引用次数: 3

摘要

氧化铝、蓝宝石的二次电子发射系数;用短脉冲电子束扫描电镜在室温和高温条件下对二氧化硅和氧化镁进行了测量。除蓝宝石外,SEE系数随温度升高而明显降低。此外,在室温和高温下,氧化铝的SEE系数随纯度和晶粒尺寸的增大而增大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Secondary electron emission of dielectric materials under high emperature condition
Secondary electron emission (SEE) coefficients of alumina, sapphire; Si02, and MgO were measured by using a SEM with short-pulsed electron beam under room and high temperatures. An appreciable reduction in the SEE coefficients with increasing temperature was confirmed, except for sapphire. In addition, it was found that at room and high temperature SEE coefficients of alumina increased with purity and grain size.
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CiteScore
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