O. Wunnicke, M. Klee, K. Reimann, C. Renders, H. van Esch, W. Keur, J. Zhao, M. de Wild, A. Roest
{"title":"MI007:电压电射频MEMS开关","authors":"O. Wunnicke, M. Klee, K. Reimann, C. Renders, H. van Esch, W. Keur, J. Zhao, M. de Wild, A. Roest","doi":"10.1109/ISAF.2008.4693747","DOIUrl":null,"url":null,"abstract":"Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ¿s. Electrical measurements yield contact resistances in the order of 50 ¿ and isolation resistance of more than 1 G¿.","PeriodicalId":228914,"journal":{"name":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MI007: Galvanic piezoelectric RF MEMS switches\",\"authors\":\"O. Wunnicke, M. Klee, K. Reimann, C. Renders, H. van Esch, W. Keur, J. Zhao, M. de Wild, A. Roest\",\"doi\":\"10.1109/ISAF.2008.4693747\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ¿s. Electrical measurements yield contact resistances in the order of 50 ¿ and isolation resistance of more than 1 G¿.\",\"PeriodicalId\":228914,\"journal\":{\"name\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2008.4693747\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2008.4693747","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ¿s. Electrical measurements yield contact resistances in the order of 50 ¿ and isolation resistance of more than 1 G¿.
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