Failure modes in surface micromachined microelectromechanical actuators

In order for the rapidly emerging field of microelectromechanical systems (MEMS) to meet its extraordinary expectations with regard to commercial impact, issues pertaining to failure must be understood. We identify failure modes common to a broad range of MEMS actuators, including adhesion (stiction) and friction-induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementation of optimized designs, model-based operational methods, and chemical surface treatments.