基于mems的三维振动微尺度测量机探头的桌面自动化装配

2011 IEEE International Symposium on Assembly and Manufacturing (ISAM) Pub Date : 2011-05-25 DOI:10.1109/ISAM.2011.5942327

J. Claverley, D. Sheu, Arne Burisch, R. Leach, A. Raatz

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引用次数: 9

摘要

本文研究了一种新型微尺度三坐标测量机(CMM)测头的装配问题。采用微细电火花加工的方法，将MEMS器件和触控笔组装成可工作的微型三坐标测量机探头。讨论了微尺度零件的生产工艺，提出了两种装配方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

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2011 IEEE International Symposium on Assembly and Manufacturing (ISAM)

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