含粘弹性层ZnO薄膜的厚度剪切振动分析

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2015-10-01 DOI:10.1109/SPAWDA.2015.7364526

Xian Fu, Jianke Du, J. Lou, Ji Wang, T. Ma, Bin Huang, Lijun Yi

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引用次数: 0

摘要

根据线性压电理论，得到了具有粘弹性介质的ZnO薄膜厚度剪切振动的频率方程。幸运的是，获得了一些有用的结果。从这些结果中我们发现，当粘性系数在0-2Ns/m2范围内时，相对共振频率显著增加。讨论了相对共振频率与粘弹性介质的密度和厚度之间的关系。在设计谐振器时需要考虑这些因素。

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Analyzing thickness shear vibration of ZnO thin film with a viscoelastic layer

According to the linear piezoelectric theory, the frequency equation of thickness shear vibration is obtained for investigating the ZnO thin film with a layer of viscoelastic media. Fortunately, some useful results are harvested. From these results, we find that the relative resonant frequency significantly increases when the viscous coefficient is in the range of 0-2Ns/m2. The relation between the relative resonant frequency and the density and thickness of the viscoelastic media also has been discussed. These need to be considered in the design of resonators.

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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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