基于像差理论的多输入通道Si3N4三柱面点阵列波导光栅的仿真、制作与表征

2023 IEEE Silicon Photonics Conference (SiPhotonics) Pub Date : 2023-04-01 DOI:10.1109/SiPhotonics55903.2023.10141973

W. Hsu, J. Zhan, Y. Zhang, S. Veilleux, M. Dagenais

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引用次数: 0

摘要

介绍了具有多输入通道的三柱头点(TSP)阵列波导光栅。在所有三个输入通道中，中心输出通道的测量传输量为-2 dB;最高分辨率达到18000以上，外部输出通道降低不到6%。

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Simulation, Fabrication and Characterization of a Si3N4 based Three Stigmatic Point Array Waveguide Grating with Multiple Input Channels by Using Aberration Theory

The Three-Stigmatic-Point (TSP) Array Waveguide Grating (AWG) with multiple input channels are demonstrated. Across all three input channels, the measured transmission of central output channel is -2 dB; the highest resolving power reaches over 18,000 with less than 6% reduction for the outer output channels.

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2023 IEEE Silicon Photonics Conference (SiPhotonics)

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