铁电存储器的复兴:它们能改变游戏规则吗?

M. Park
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引用次数: 0

摘要

铁电存储器自1952年首次提出以来,已经研究了大约60年。铁电体的材料特性被认为是通用存储器的理想材料,具有电程序/擦除和读取过程的可用性。然而,块体铁电材料物理缩小的挑战是铁电材料成功的关键障碍。2011年,基于hfo2的薄膜中的铁电性首次被报道,这一意想不到的发现使铁电存储器的研究复活。本文综述了hfo2基铁电体的性质、发展历史和应用,并对基于hfo2基铁电体的半导体器件进行了展望。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Renaissance of Ferroelectric Memories: Can They Be a Game-changer?
Ferroelectric memories have been studied for ∼60 years since their first suggestion in 1952. The material properties of ferroelectrics are considered ideal for universal memories with the availability of electrical program/erase and read processes. However, challenges in the physical scaling down of bulk ferroelectric materials were a critical hurdle for the success of ferroelectric materials. In 2011, ferroelectricity in HfO2-based thin film was first reported, and this unexpected discovery revived research on ferroelectric memories. In this review, the properties, history, and applications of HfO2-based ferroelectrics are reviewed, and a perspective on semiconductor devices based on them is provided.
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