高性能惯性传感器的光学微结构

2019 IEEE Research and Applications of Photonics in Defense Conference (RAPID) Pub Date : 2019-08-01 DOI:10.1109/RAPID.2019.8864399

B. Pant, Jianfeng Wu, Neil A. Krueger, K. Nelson, W. Williams, C. Fertig, G. Sanders, R. Compton, E. Benser, G. Lodden

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引用次数: 0

摘要

我们报告了精密光学微结构的进展，例如邮票大小的光学表，旨在小型化和降低导航级陀螺仪的成本。其他芯片级的发展包括基于光波导的激光陀螺仪，以及分别用于枪硬陀螺仪和加速度计的具有光学读出的谐振光机械结构。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical Microstructures for High Performance Inertial Sensors

We report progress on precision optical microstructures such as a postage stamp-sized optics table aimed at miniaturization and cost reduction of navigation-grade gyroscopes. Other chip-scale developments include an optical waveguide-based laser gyroscope, and resonant opto-mechanical structures with optical readout for gun-hard gyroscopes and accelerometers, respectively.

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2019 IEEE Research and Applications of Photonics in Defense Conference (RAPID)

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