{"title":"第二振型压电谐振力传感器","authors":"K. Yamashita, P. Muralt","doi":"10.1109/ISAF.2018.8463273","DOIUrl":null,"url":null,"abstract":"A resonating force sensor is studied, which is composed of a metal bridge coated with a piezoelectric film for force detection. It is thought to operate the sensor at the second flexural vibration mode having one node at the center of the bridge. Resonance frequency and piezoelectric coupling are investigated in the frame of an analytical model, and compared with finite element analysis (FEA) in a desired force range. The resonance frequency-force relation derived from the analytical model is close the the FEA result in the force range. The coupling factor-force relation from the analytical model agrees with the one from FEA in the small force region, but it shows lower coupling than the FEA result in the large force region.","PeriodicalId":231071,"journal":{"name":"2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Piezoelectric Resonating Force Sensor in the Second Vibration Mode\",\"authors\":\"K. Yamashita, P. Muralt\",\"doi\":\"10.1109/ISAF.2018.8463273\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A resonating force sensor is studied, which is composed of a metal bridge coated with a piezoelectric film for force detection. It is thought to operate the sensor at the second flexural vibration mode having one node at the center of the bridge. Resonance frequency and piezoelectric coupling are investigated in the frame of an analytical model, and compared with finite element analysis (FEA) in a desired force range. The resonance frequency-force relation derived from the analytical model is close the the FEA result in the force range. The coupling factor-force relation from the analytical model agrees with the one from FEA in the small force region, but it shows lower coupling than the FEA result in the large force region.\",\"PeriodicalId\":231071,\"journal\":{\"name\":\"2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2018.8463273\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2018.8463273","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric Resonating Force Sensor in the Second Vibration Mode
A resonating force sensor is studied, which is composed of a metal bridge coated with a piezoelectric film for force detection. It is thought to operate the sensor at the second flexural vibration mode having one node at the center of the bridge. Resonance frequency and piezoelectric coupling are investigated in the frame of an analytical model, and compared with finite element analysis (FEA) in a desired force range. The resonance frequency-force relation derived from the analytical model is close the the FEA result in the force range. The coupling factor-force relation from the analytical model agrees with the one from FEA in the small force region, but it shows lower coupling than the FEA result in the large force region.
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