{"title":"用于纳米级CMOS设计的新型双材料双栅(DMDG) SOI MOSFET","authors":"G. Reddy, M.J. Kumar","doi":"10.1109/ISDRS.2003.1272078","DOIUrl":null,"url":null,"abstract":"Double-gate (DG) SOI MOSFETs employing asymmetrical gate structure (front gate p/sup +/ poly and back gate n/sup +/ poly) are foreseen to be a solution to the scaling limits imposed by bulk MOSFETs. However, for channel lengths below 100 nm, the DG SOI MOSFET is not completely immune to the short-channel effects and in the main challenge in device design. In this paper a new dual-material double-gate (DMDG) SOI MOSFET to overcome this nanoscale regime while simultaneously achieving a higher transconductance and reduced drain induced barrier lowering compared to the DG SOI MOSFET is proposed using two-dimensional simulations. This article further demonstrates a considerable reduction in the peak electric field near the drain end, increased drain breakdown voltage and the desirable threshold voltage \"roll-up\" even for channel lengths far below 100 nm. The DMDG structure exhibits a step function in the surface potential along the channel. The I/sub D/-V/sub DS/ characteristics of both the devices are discussed.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A new dual-material double-gate (DMDG) SOI MOSFET for nanoscale CMOS design\",\"authors\":\"G. Reddy, M.J. Kumar\",\"doi\":\"10.1109/ISDRS.2003.1272078\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Double-gate (DG) SOI MOSFETs employing asymmetrical gate structure (front gate p/sup +/ poly and back gate n/sup +/ poly) are foreseen to be a solution to the scaling limits imposed by bulk MOSFETs. However, for channel lengths below 100 nm, the DG SOI MOSFET is not completely immune to the short-channel effects and in the main challenge in device design. In this paper a new dual-material double-gate (DMDG) SOI MOSFET to overcome this nanoscale regime while simultaneously achieving a higher transconductance and reduced drain induced barrier lowering compared to the DG SOI MOSFET is proposed using two-dimensional simulations. This article further demonstrates a considerable reduction in the peak electric field near the drain end, increased drain breakdown voltage and the desirable threshold voltage \\\"roll-up\\\" even for channel lengths far below 100 nm. The DMDG structure exhibits a step function in the surface potential along the channel. The I/sub D/-V/sub DS/ characteristics of both the devices are discussed.\",\"PeriodicalId\":369241,\"journal\":{\"name\":\"International Semiconductor Device Research Symposium, 2003\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-12-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Semiconductor Device Research Symposium, 2003\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISDRS.2003.1272078\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Semiconductor Device Research Symposium, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISDRS.2003.1272078","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
采用非对称栅极结构(正门p/sup +/ poly和后门n/sup +/ poly)的双栅SOI mosfet被认为是解决体积mosfet所施加的缩放限制的一种解决方案。然而,对于小于100nm的沟道长度,DG SOI MOSFET不能完全免受短沟道效应的影响,这是器件设计中的主要挑战。本文提出了一种新的双材料双栅极(DMDG) SOI MOSFET,以克服这种纳米级机制,同时实现比DG SOI MOSFET更高的跨导性和更低的漏极诱导势垒降低。本文进一步证明了漏极端附近的峰值电场显著降低,漏极击穿电压增加,即使通道长度远低于100 nm,理想的阈值电压也会“卷起”。DMDG结构沿通道表面电位呈阶跃函数。讨论了两种器件的I/sub / D/-V/sub / DS/特性。
A new dual-material double-gate (DMDG) SOI MOSFET for nanoscale CMOS design
Double-gate (DG) SOI MOSFETs employing asymmetrical gate structure (front gate p/sup +/ poly and back gate n/sup +/ poly) are foreseen to be a solution to the scaling limits imposed by bulk MOSFETs. However, for channel lengths below 100 nm, the DG SOI MOSFET is not completely immune to the short-channel effects and in the main challenge in device design. In this paper a new dual-material double-gate (DMDG) SOI MOSFET to overcome this nanoscale regime while simultaneously achieving a higher transconductance and reduced drain induced barrier lowering compared to the DG SOI MOSFET is proposed using two-dimensional simulations. This article further demonstrates a considerable reduction in the peak electric field near the drain end, increased drain breakdown voltage and the desirable threshold voltage "roll-up" even for channel lengths far below 100 nm. The DMDG structure exhibits a step function in the surface potential along the channel. The I/sub D/-V/sub DS/ characteristics of both the devices are discussed.