Micromachined planar probe using half-SIW and half-shielded stripline structure for permittivity measurement

This paper reports on a micromachined planar type probe based on a novel hybrid shielded stripline. The proposed structure is for a broadband transverse electromagnetic (TEM) single-mode propagation using substrate integrated waveguide (SIW) and conventional shielded stripline. We suggested a novel probe structure that composed of half-SIW and half-shielded stripline, which combined through a benzocyclobutene (BCB) bonding layer. The structural concept and simple fabrication method has been introduced, and the S11 in air was measured from 0.5 GHz to 30 GHz. The permittivity measurement of 0.9 % saline has been performed to validate the proposed structure at frequencies from 0.5 GHz to 20 GHz.