绝缘体上硅脊波导中的面外全内反射耦合镜

3rd IEEE International Conference on Group IV Photonics, 2006. Pub Date : 2006-10-09 DOI:10.1109/GROUP4.2006.1708194

P. Cheben, B. Lamontagne, E. Post, S. Janz, D. Xu, A. Delâge

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引用次数: 0

摘要

本文描述了绝缘体上硅脊波导中面外耦合反射镜的制备及其性能。镜子由一个45度的面组成，通过光刻定义的窗口使用定向CAIBE蚀刻形成

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Out-of-Plane Total Internal Reflection Coupling Mirrors in Silicon-on-Insulator Ridge Waveguides

We describe the fabrication and performance of out-of-plane coupling mirrors in silicon-on-insulator (SOI) ridge waveguides. The mirrors consisted of a 45deg facet formed using directional CAIBE etching through a lithographically defined window

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3rd IEEE International Conference on Group IV Photonics, 2006.

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