扫描电子显微镜下的电子-光子相互作用

John W Simonaitis, M. Krielaart, Stewart A. Koppell, B. Slayton, Joseph Alongi, W. Putnam, K. Berggren, P. Keathley
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引用次数: 0

摘要

在这项工作中,我们描述了一个在1至20 kev扫描电子显微镜下研究自由电子光子相互作用的测试平台。该装置包括一个超快发射器、用于构建电子束的光学调制器、一个纳米结构的相互作用区,以及带有时间标记电子设备的电子和光学光谱仪,以表征这些相互作用。通过这项工作,我们的目标是在电子能量比大多数以前的工作低几个数量级的情况下理解这些相互作用,使它们得到更广泛的采用,并有可能导致芯片规模的技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electron-Photon Interactions in a Scanning Electron Microscope
In this work, we describe a testbed for studying free-electron photon interactions in a 1 to 20-keV scanning electron microscope. The setup includes an ultrafast emitter, optical modulators for structuring the electron beam, a nanostructured interaction zone, and electron and optical spectrometers with time-tagging electronics to characterize these interactions. Through this work we aim to understand these interactions at electron energies orders-of-magnitude lower than used in most previous work, enabling their more widespread adoption and potentially leading to chip-scale technologies.
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