G. Angelov, D. Nikolov, M. Spasova, I. Ruskova, Jivko Rusev, R. Rusev
{"title":"14nm finfet实验数据分析","authors":"G. Angelov, D. Nikolov, M. Spasova, I. Ruskova, Jivko Rusev, R. Rusev","doi":"10.1109/ET.2018.8549623","DOIUrl":null,"url":null,"abstract":"In this paper we analyze measurements data of different 14 nm bulk FinFET structures – both n- and p-type. The analysis is based on the smoothness of the experimental characteristics. Smoothness is important for the subsequent parameter extraction procedures. It is estimated by taking first derivatives of the experimental curves and comparing them to their fitted polynomial. Calculations have been performed in Matlab.","PeriodicalId":374877,"journal":{"name":"2018 IEEE XXVII International Scientific Conference Electronics - ET","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Analysis of Experimental Data for 14-nm FinFETs\",\"authors\":\"G. Angelov, D. Nikolov, M. Spasova, I. Ruskova, Jivko Rusev, R. Rusev\",\"doi\":\"10.1109/ET.2018.8549623\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we analyze measurements data of different 14 nm bulk FinFET structures – both n- and p-type. The analysis is based on the smoothness of the experimental characteristics. Smoothness is important for the subsequent parameter extraction procedures. It is estimated by taking first derivatives of the experimental curves and comparing them to their fitted polynomial. Calculations have been performed in Matlab.\",\"PeriodicalId\":374877,\"journal\":{\"name\":\"2018 IEEE XXVII International Scientific Conference Electronics - ET\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE XXVII International Scientific Conference Electronics - ET\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ET.2018.8549623\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE XXVII International Scientific Conference Electronics - ET","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ET.2018.8549623","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper we analyze measurements data of different 14 nm bulk FinFET structures – both n- and p-type. The analysis is based on the smoothness of the experimental characteristics. Smoothness is important for the subsequent parameter extraction procedures. It is estimated by taking first derivatives of the experimental curves and comparing them to their fitted polynomial. Calculations have been performed in Matlab.
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