表面声波谐振器的非均匀应力分布分析

2008 IEEE International Frequency Control Symposium Pub Date : 2008-05-19 DOI:10.1109/FREQ.2008.4622961

D. Hermelin, W. Daniaux, J. Garcia, S. Ballandras, B. Belgacem, M. Bruniaux

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引用次数: 2

摘要

本文讨论了允许解释表面声波(SAW)谐振器在非均匀应力下的电响应的演练。在放置谐振器的圆膜上施加压力会引起非均匀应力，从而改变谐振器的谐振频率和质量系数。本文描述了一个成熟的模型，允许解释这两个参数的行为。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analysis of inhomogeneous stress distribution in surface acoustic wave resonator

This paper deals with walk-through allowing to explain the electrical response of a surface acoustic wave (SAW) resonator under inhomogeneous stress. Act of pressure on a circular membrane where is put the resonator induces inhomogeneous stress and changes the resonance frequency and the quality factor of the resonator. This paper describes a developed model allowing to explain the behavior of these two parameters.

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2008 IEEE International Frequency Control Symposium

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