激光微加工高频超声阵列

M. Lukacs, M. Sayer, G. Lockwood, S. Foster
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引用次数: 47

摘要

利用激光微加工技术对压电陶瓷进行了图案化处理,形成了频率在35 ~ 45mhz范围内谐振的超声阵列。Lumonics PM-844准分子激光器与KrF气体混合物(248 nm)已被用于微机械沟槽的宽度与深度的纵横比高达1:5。采用投影刻蚀方法,利用准分子激光的大孔径同时刻蚀复杂几何图形的特征。预极化陶瓷结构>20 /spl mu/m宽,>35 /spl mu/m厚,已被切割并通过SEM图像验证。利用阻抗分析仪和脉冲回波技术对材料的介电、压电和声学性能进行了评估。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser micromachined high frequency ultrasonic arrays
Piezoelectric ceramics have been patterned by means of laser micromachining to create ultrasonic arrays resonating in the frequency range of 35-45 MHz. The Lumonics PM-844 excimer laser with a KrF gas mixture (248 nm) has been used to micromachine trenches with a width to depth aspect ratio of up to 1:5. By using a projection etch approach, the large aperture of the excimer laser is used to simultaneously ablate the features of a complex geometrical pattern. Pre-poled ceramic structures >20 /spl mu/m wide and >35 /spl mu/m thick have been cut and validated with SEM images. The dielectric, piezoelectric and acoustic properties have been evaluated using an impedance analyser and pulse-echo techniques.
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