在薄膜沉积过程中测量应力的哈特曼筛选试验

ACOFT/AOS 2006 - Australian Conference on Optical Fibre Technology/Australian Optical Society Pub Date : 2006-07-10 DOI:10.1109/ACOFT.2006.4519323

P. Wilksch, F. Forouzandeh

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摘要

用于测量表面曲率变化的哈特曼筛选测试已被用于创建一个系统，用于在等离子沉积过程中对薄膜中的内应力进行连续的原位监测。

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Hartmann screen test for measurement of stress during thin film deposition

The Hartmann screen test for measuring changes in curvature of a surface has been adapted to create a system for continuous in situ monitoring of the internal stress in thin films during plasma deposition.

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ACOFT/AOS 2006 - Australian Conference on Optical Fibre Technology/Australian Optical Society

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