有机电致发光器件用ITO衬底的电学特性及表面分析

S. Fujita, K. Tanaka
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引用次数: 0

摘要

有机电致发光器件有望成为取代液晶和环保光源的下一代平板显示器器件,并正在积极进行研究和开发。由于有机电致发光器件具有在ITO电极上沉积有机层的多层结构,推测电极表面形状对器件的电特性和发射特性有影响。本研究除了利用AFM图像观察真空沉积和溅射沉积ITO电极的表面形状,测量元素分布和晶体结构状态外,还制备了EL器件,并进行了电特性测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical properties of organic thin films and surface analyses of ITO substrate for organic EL device
Organic electroluminescent devices are looked forward to as devices for next generation flat panel displays to replace liquid crystal and environmentally friendly light sources, and aggressive research and development on them is being conducted. As the organic electroluminescent devices have a multilayer structure depositing organic layers on ITO electrodes, it is surmised that the shape of the surface of the electrode has influences on electrical characteristics and emission characteristics of the device. In this research, in addition to observation of the shape of surface by AFM images of ITO electrodes deposited by vacuum deposition and sputtering and measurement of the state of element distribution and crystal structure, EL devices were prepared and measurement of electrical characteristics was conducted.
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