基于MEMS技术提高信息系统精度

2022 IEEE XVIII International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) Pub Date : 2022-09-07 DOI:10.1109/MEMSTECH55132.2022.10002911

O. Sushchenko, Y. Bezkorovainyi, V. Golitsyn

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引用次数: 0

摘要

介绍了基于微机电系统技术的传感器精度的提高。分析了微机电传感器在工业中的应用。提出了标定技术。阐述了回归方法实现的特点。给出了过滤的过程。提高精度的结果用图形表示。所得结果表明了该方法的有效性。

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Improving Accuracy in Information Systems Based on MEMS Technology

The paper represents the improvement of accuracy in sensors based on microelectromechanical systems technology. The analysis of application microelectromechanical sensors in the industry is analysed. The calibration technique is proposed. The features of realizing the regression method are represented. The procedure of filtering is represented. Results of improving accuracy are represented graphically way. The obtained results have shown the efficiency of the proposed approach.

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来源期刊

2022 IEEE XVIII International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)

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