{"title":"宽光谱即插即用菲索干涉测量系统","authors":"Qi Lu, Xu Zhang, Yunbo Bai, Ying Sun, Shijie Liu, J. Shao","doi":"10.1117/12.2603720","DOIUrl":null,"url":null,"abstract":"In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A wide-spectrum plug-and-play Fizeau interferometric system\",\"authors\":\"Qi Lu, Xu Zhang, Yunbo Bai, Ying Sun, Shijie Liu, J. Shao\",\"doi\":\"10.1117/12.2603720\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.\",\"PeriodicalId\":298149,\"journal\":{\"name\":\"Optical Metrology and Inspection for Industrial Applications VIII\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-10-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Metrology and Inspection for Industrial Applications VIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2603720\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Metrology and Inspection for Industrial Applications VIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2603720","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A wide-spectrum plug-and-play Fizeau interferometric system
In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.
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