包封膜的解析建模

2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) Pub Date : 2016-04-20 DOI:10.1109/MEMSTECH.2016.7507508

C. Maj, P. Zając, M. Szermer, M. Melnyk, A. Napieralski, M. Lobur

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引用次数: 1

摘要

在设计过程的早期阶段，建模是一个至关重要的阶段，因为它允许设计师在制造之前估计设备的性能。通常，这一阶段是使用FEM模拟器来执行的，这通常是耗时的。在许多情况下，特别是在使用简单结构时，使用解析模型更为方便。本文提出了一个中心有凸台的膜弯曲解析模型。该模型考虑了方形膜和矩形膜的挠度和应力分布。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analytical modelling of bossed membrane

In early stage of the design process, modelling is a crucial phase because it allows the designer estimating the device performance before fabrication. Very often, this phase is performed with use of FEM simulator that is usually time consuming. In many cases, especially when simple structures are used, the use of analytical model is more convenient. In this paper we present an analytical model of membrane bending containing a boss in its centre. The model concerns the membrane deflection and stress distribution in case of square and rectangular membranes.

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来源期刊

2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)

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