用于远距离光纤直线位移传感器的锥形组合光栅

Z. El Rawashdeh, P. Revel, C. Prelle, F. Lamarque
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引用次数: 2

摘要

本文介绍了一种新型光纤位移传感器的初步设计;它用于测量执行螺旋运动的驱动器的线性位移。该传感器由一组组装的锥体组成,它们构成一个反射光栅和两个光纤探头。它的特点是能够沿着毫米范围测量位移,具有高亚微米分辨率。在这项工作中,提出了传感器的几何模型,以及在弯曲反射表面前的单探头响应,以及光栅形状,这证实了测量原理。由于两个探头模拟输出信号的重叠,这种光栅设计使得位移测量成为可能。在弯曲反射面前的单探头测量结果与仿真结果吻合较好。利用高精度车床和单晶金刚石刀具在铝合金上制作了圆锥组合光栅的原型;利用纳米聚焦μ扫描光学轮廓仪对光栅的几何参数进行了测量。模拟的几何参数与实际参数吻合较好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Cones-assembled grating for long-range fiber-optic linear displacement sensor
This paper presents the initial design of a new fiber-optic displacement sensor; it is used to measure the linear displacement of an actuator performing a helical movement. This sensor consists of a set of assembled cones, which constitute a reflective grating, and two fiber-optic probes. It is characterised by its ability to measure the displacement along a millimetric range, with a high sub-micrometric resolution. In this work, the geometric model of the sensor is presented as well in terms of single probe response in front of a curved reflective surface as in terms of grating shape which authorizes the measurement principle. This grating design makes the displacement measurement possible due to the overlap of the two probes simulated output signals. The single probe measurement in front of a curved reflective surface demonstrates a good agreement with simulation results. A prototype of the cones-assembled grating has been fabricated using a high precision turning machine and a single-crystal diamond tool on an aluminium alloy; the geometric parameters of the fabricated grating were evaluated with the help of a Nanofocus™ μscan optical profilometer. The agreement between the simulated geometric parameters and the real parameters is very good.
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