大型激光比较仪的阿贝误差消除方法

Jianshuan Li, M. Zhang, Ming-zhao He, Dongjing Miao, Xiangrui Deng, Lianfu Li
{"title":"大型激光比较仪的阿贝误差消除方法","authors":"Jianshuan Li, M. Zhang, Ming-zhao He, Dongjing Miao, Xiangrui Deng, Lianfu Li","doi":"10.1117/12.2181500","DOIUrl":null,"url":null,"abstract":"Abbe error is the inherent systematic error in all large-scale laser comparators because the standard laser axis is not in line with measured optical axis. Any angular error of the moving platform will result in the offset from the measured optical axis to the standard laser axis. This paper describes to an algorithm which could be used to calculate the displacement of an equivalent standard laser interferometer and to eliminate an Abbe error. The algorithm could also be used to reduce the Abbe error of a large-scale laser comparator. Experimental results indicated that the uncertainty of displacement measurement due to Abbe error could be effectively reduced when the position error of the measured optical axis was taken into account.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Elimination of Abbe error method of large-scale laser comparator\",\"authors\":\"Jianshuan Li, M. Zhang, Ming-zhao He, Dongjing Miao, Xiangrui Deng, Lianfu Li\",\"doi\":\"10.1117/12.2181500\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abbe error is the inherent systematic error in all large-scale laser comparators because the standard laser axis is not in line with measured optical axis. Any angular error of the moving platform will result in the offset from the measured optical axis to the standard laser axis. This paper describes to an algorithm which could be used to calculate the displacement of an equivalent standard laser interferometer and to eliminate an Abbe error. The algorithm could also be used to reduce the Abbe error of a large-scale laser comparator. Experimental results indicated that the uncertainty of displacement measurement due to Abbe error could be effectively reduced when the position error of the measured optical axis was taken into account.\",\"PeriodicalId\":380636,\"journal\":{\"name\":\"Precision Engineering Measurements and Instrumentation\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Engineering Measurements and Instrumentation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2181500\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering Measurements and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2181500","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

阿贝误差是所有大型激光比较仪由于标准激光轴与被测光轴不一致而产生的固有系统误差。移动平台的任何角度误差都会导致被测光轴与标准激光轴的偏移。本文介绍了一种计算等效标准激光干涉仪位移和消除阿贝误差的算法。该算法还可用于降低大型激光比较仪的阿贝误差。实验结果表明,在考虑被测光轴位置误差的情况下,可有效降低由阿贝误差引起的位移测量不确定度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Elimination of Abbe error method of large-scale laser comparator
Abbe error is the inherent systematic error in all large-scale laser comparators because the standard laser axis is not in line with measured optical axis. Any angular error of the moving platform will result in the offset from the measured optical axis to the standard laser axis. This paper describes to an algorithm which could be used to calculate the displacement of an equivalent standard laser interferometer and to eliminate an Abbe error. The algorithm could also be used to reduce the Abbe error of a large-scale laser comparator. Experimental results indicated that the uncertainty of displacement measurement due to Abbe error could be effectively reduced when the position error of the measured optical axis was taken into account.
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