电压控制微机械SOI光波导

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings Pub Date : 1995-11-06 DOI:10.1109/TENCON.1995.496371

T. Eng, S. Kan, G. Wong

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引用次数: 1

摘要

我们演示了压控可移动SOI光波导的制作和工作。制造工艺是基于表面微加工的SOI衬底。对其动力响应进行了研究。我们的结果表明，在典型的光纤开关应用中，仅几伏特的开关电压就足以产生有用的导光偏转幅度。在电压控制的静电驱动下，导光的偏转幅度为290 /spl mu/m。

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Voltage-controlled micromechanical SOI optical waveguides

We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 /spl mu/m for the guided light is demonstrated with voltage-controlled electrostatic actuation.

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来源期刊

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

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