精密干涉特性,以准确测试非球面

S. Vankerkhove, Paul F. Michaloski
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引用次数: 0

摘要

光学元件(如球体和平面)的干涉表面测试可以用常规干涉测量法进行,其中通过结合参考减法或更复杂的绝对表征技术可以实现高精度。非球面零透镜测试无法使用参考减法或绝对校准技术来分离存在于测试装置和非球面之间的旋转对称像差。此外,从表面到相机成像时存在的区域定位误差可以用常规测试来解释,但在制造过程中,不规则区域的位置对于非球面部件的校正至关重要。为了获得精确的非球面,必须设计、制造高精度的干涉零测试台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Precision Interferometric Characterization to Accurately Test Aspheric Surfaces
Interferometric surface testing of optical components such as spheres and flats can be performed quite routinely with conventional interferometry where high accuracy can be achieved by incorporating reference subtraction or more complicated absolute characterization techniques. Aspheric null lens tests suffer from an inability to use reference subtraction or absolute calibration techniques to separate rotationally symmetric aberrations that exist between the test setup and the aspheric surface. Furthermore, zonal positioning errors that exist when imaging from surface to camera can be accounted for with conventional tests, but the zonal location of irregularities is crucial in the correction of aspheric components during the fabrication process. The interferometric null test bench must be designed, built, and characterized with high precision to achieve accurate aspheric surfaces.
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