Youssef Mokadem, S. Bégot, F. Lanzetta, J. Rauch, Aymen Zribi, V. Moutarlier, M. Barthès
{"title":"低温退火对热流传感用镍rtd的影响","authors":"Youssef Mokadem, S. Bégot, F. Lanzetta, J. Rauch, Aymen Zribi, V. Moutarlier, M. Barthès","doi":"10.1051/metrology/201918007","DOIUrl":null,"url":null,"abstract":"In this paper, we study the influence of annealing on the performance of Resistive Temperature Detectors made from Nickel thin films. The aimed application is heat flux sensing. The substrate is made of Borofloat glass with a Chromium adhesive layer. Several annealing temperatures between 150°C and 300°C are applied to this assembly. The thin films as deposited and after annealing are analyzed through SEM images. The evolution of the resistance and the temperature coefficient of the sensor are discussed. An annealing temperature is selected that ensures the repeatability of measurements.","PeriodicalId":391124,"journal":{"name":"19th International Congress of Metrology (CIM2019)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing\",\"authors\":\"Youssef Mokadem, S. Bégot, F. Lanzetta, J. Rauch, Aymen Zribi, V. Moutarlier, M. Barthès\",\"doi\":\"10.1051/metrology/201918007\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we study the influence of annealing on the performance of Resistive Temperature Detectors made from Nickel thin films. The aimed application is heat flux sensing. The substrate is made of Borofloat glass with a Chromium adhesive layer. Several annealing temperatures between 150°C and 300°C are applied to this assembly. The thin films as deposited and after annealing are analyzed through SEM images. The evolution of the resistance and the temperature coefficient of the sensor are discussed. An annealing temperature is selected that ensures the repeatability of measurements.\",\"PeriodicalId\":391124,\"journal\":{\"name\":\"19th International Congress of Metrology (CIM2019)\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th International Congress of Metrology (CIM2019)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1051/metrology/201918007\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th International Congress of Metrology (CIM2019)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/metrology/201918007","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing
In this paper, we study the influence of annealing on the performance of Resistive Temperature Detectors made from Nickel thin films. The aimed application is heat flux sensing. The substrate is made of Borofloat glass with a Chromium adhesive layer. Several annealing temperatures between 150°C and 300°C are applied to this assembly. The thin films as deposited and after annealing are analyzed through SEM images. The evolution of the resistance and the temperature coefficient of the sensor are discussed. An annealing temperature is selected that ensures the repeatability of measurements.
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