质量因子为107的氮化硅波导耦合微盘谐振器

2019 IEEE 16th International Conference on Group IV Photonics (GFP) Pub Date : 2019-08-01 DOI:10.1109/GROUP4.2019.8853929

A. Poon, Kaiyi Wu

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引用次数: 0

摘要

我们设计和制造了色散工程的~ 830nm厚的Si3N4波导耦合微盘。我们的谐振器显示负载质量(Q)因子为~ 1×107。我们观察到半径345μm的微磁盘在波导中具有约50 mW的阈值泵浦功率时的光学参量振荡。

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Si3N4 Waveguide-Coupled Microdisk Resonators with a Quality Factor of 107

We design and fabricate dispersion-engineered ∼830nm-thick Si₃N₄ waveguide-coupled microdisks. Our resonators show a loaded quality (Q)-factor of ∼1×10⁷. We observe optical parametric oscillations in a 345μm-radius microdisk with a threshold pump power of ∼50 mW in the waveguide.

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2019 IEEE 16th International Conference on Group IV Photonics (GFP)

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