新型激光辅助广角层析原子探针

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-17 DOI:10.1017/S1431927606063410

L. Renaud, P. Monsallut, Ph. Benard, P. Saliot, G. da Costa, F. Vurpillot, B. Deconihout

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引用次数: 13

摘要

为了克服传统三维原子探针的缺点，研制了激光辅助广角层析原子探针(La-WATAP)。该仪器具有两个主要优点:更大的视野和适用于非和半导体材料

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The New Laser Assisted Wide Angle Tomographic Atom Probe

A laser assisted wide angle tomographic atom probe (La-WATAP) was developed to overcome traditional drawbacks of a conventional 3D atom probe. This instrument offers two major advantages: a larger field of view and its applicability to non- and semiconductor materials

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2006 19th International Vacuum Nanoelectronics Conference

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