Irfan Ansari, D. Thourhout, J. George, G. F. Feutmba, J. Beeckman
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We demonstrate acousto-optic modulation (VπL ~3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.
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