{"title":"集成光子学应用中TiO2纳米层的物理性质研究","authors":"P. Struk, T. Pustelny","doi":"10.1117/12.2244141","DOIUrl":null,"url":null,"abstract":"The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.","PeriodicalId":101814,"journal":{"name":"Scientific Conference on Optical and Electronic Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Research of physical properties of TiO2 nanolayers for integrated photonics applications\",\"authors\":\"P. Struk, T. Pustelny\",\"doi\":\"10.1117/12.2244141\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.\",\"PeriodicalId\":101814,\"journal\":{\"name\":\"Scientific Conference on Optical and Electronic Sensors\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Scientific Conference on Optical and Electronic Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2244141\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scientific Conference on Optical and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2244141","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Research of physical properties of TiO2 nanolayers for integrated photonics applications
The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.
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